Effect of additional dielectric layer and grounded shield on rf characteristics of GaAs microwave monolithic integrated circuit elements in 3D-integrated modules

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The effect of coating GaAs monolithic integrated circuit with a benzocyclobutene dielectric layer and grounded copper shield is investigated. Using electromagnetic simulation up to 40 GHz, changes of RF characteristics of microstrip and coplanar transmission lines, a Marshand balun, and a bandpass filter due to coating are demonstrated. It is shown that from the performance variation viewpoint, the application of lines is preferred in GaAs monolithic integrated circuits used in 3D-integrated modules with such the coating.

作者简介

F. Sheyerman

Tomsk State University of Control Systems and Radioelectronics

编辑信件的主要联系方式.
Email: fish@tusur.ru
俄罗斯联邦, Lenin Avenue, 40, Tomsk, 634050

N. Goleneva

Tomsk State University of Control Systems and Radioelectronics

Email: fish@tusur.ru
俄罗斯联邦, Lenin Avenue, 40, Tomsk, 634050

A. Kokolov

Tomsk State University of Control Systems and Radioelectronics

Email: fish@tusur.ru
俄罗斯联邦, Lenin Avenue, 40, Tomsk, 634050

L. Babak

Tomsk State University of Control Systems and Radioelectronics

Email: fish@tusur.ru
俄罗斯联邦, Lenin Avenue, 40, Tomsk, 634050

M. Cherkashin

Tomsk State University of Control Systems and Radioelectronics

Email: fish@tusur.ru
俄罗斯联邦, Lenin Avenue, 40, Tomsk, 634050

P. Panasenko

SC «MERI»

Email: fish@tusur.ru
俄罗斯联邦, Akademika Valieva Str., 6/1, Zelenograd, 124460

А. Volosov

SC «MERI»

Email: fish@tusur.ru
俄罗斯联邦, Akademika Valieva Str., 6/1, Zelenograd, 124460

参考

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  6. Huang С.H., Chen C.H., Horng T.S. // Proc. 2009 Asia Pacific Microwave Conf. Singapore. 7–10 Dec. N.Y.: IEEE, 2009. P. 1004.
  7. Маттей Д.Л., Янг Л., Джонс Е.М.Т. Фильтры СВЧ, согласующие цепи и цепи связи. М.: Связь, 1972.

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